dc.contributor.advisor | Straňák, Vítězslav | |
dc.contributor.author | Sezemský, Petr | |
dc.date.accessioned | 2021-12-08T12:56:32Z | |
dc.date.available | 2021-12-08T12:56:32Z | |
dc.date.issued | 2017 | |
dc.date.submitted | 2016-12-14 | |
dc.identifier.uri | https://dspace.jcu.cz/handle/123456789/33994 | |
dc.language.iso | eng | |
dc.publisher | Jihočeská univerzita | cze |
dc.rights | Bez omezení | |
dc.subject | plasma discharge | eng |
dc.subject | plasma diagnostics | eng |
dc.subject | surface diagnostics | eng |
dc.subject | magnetron sputtering | eng |
dc.subject | indium tin oxide | eng |
dc.subject | ITO | eng |
dc.subject | electrically conductive transparent oxide | eng |
dc.subject | optical fibre | eng |
dc.title | Deposition of functional thin films by plasma processes | cze |
dc.title.alternative | Deposition of functional thin films by plasma processes | eng |
dc.type | diplomová práce | cze |
dc.identifier.stag | 41626 | |
dc.description.abstract-translated | An aim of this work is a research of a deposition process of indium tin oxide by plasma assisted methods. The thesis deals with plasma diagnostics, e.g. Langmuir probe diagnostics and optical emission spectroscopy, as well as describes experiments of film deposition including their diagnostics, e.g. absorption spectroscopy, X-ray diffractometry and atomic force microscopy. | eng |
dc.date.accepted | 2017-01-20 | |
dc.description.department | Přírodovědecká fakulta | cze |
dc.thesis.degree-discipline | Fyzikální měření a modelování | cze |
dc.thesis.degree-grantor | Jihočeská univerzita. Přírodovědecká fakulta | cze |
dc.thesis.degree-name | Mgr. | |
dc.thesis.degree-program | Fyzika | cze |
dc.description.grade | Dokončená práce s úspěšnou obhajobou | cze |
dc.contributor.referee | Čada, Martin | |
dc.contributor.referee | Hubička, Zdeněk | |